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Introduction
Fundamentals of the TEM technique
Beam-sample interaction
The Analytical TEM
Detector Protection
Qualitative Analysis
Quantitative Analysis
Microanalysis Examples (1)
Microanalysis Examples (2)
Microanalysis Examples (3)
Summary

 

Examples of Microanalysis in the TEM

 

Spectrum Imaging Using SmartMap™ in INCAEnergyTEM

 

Modern EDS systems offer spectrum imaging, where all X-ray information detected during an X-ray map collection is saved. In this way a full X-ray spectrum is acquired and stored for every pixel in the map and used to investigate further aspects of the chemistry of the sample during or after the acquisition. The main advantage of analyzing samples in this fashion is that minimal knowledge of the sample composition is required prior to X-ray analysis since all X-ray data is collected. For example, there is no need to define specific energy windows for mapping before collecting the data as this can be done during or after the acquisition. It is important that X-ray maps are dead time corrected, so any changes in count rate due to variation of sample thickness or beam intensity are correctly represented and no associated artifacts are created in the maps.

 

The spectrum image data in INCAEnergyTEM is referred to as a SmartMap and the software provides a series of tools for reconstructing spectra, linescans and maps from a single SmartMap. For example, a SmartMap has been collected from a two phase ceramic sample consisting of aluminium oxide and titanium carbide. The collected datacube contains 2.5 million X-rays and was acquired for 30 minutes. Data from the SmartMap file has been used to reconstruct X-ray maps for the major elements in the sample: including titanium (orange), and aluminium (green) (Figure 8). Representative spectra describing the different phases clearly identify the aluminum oxide and titanium carbide.

 

 

Spectra have been reconstructed from 20nm square areas across a TiC grain to study the chemistry at grain boundaries in this ceramic material (Figure 9). Using the quantitative linescan software in INCAEnergyTEM, the chemistry variations across these grain boundaries can be determined (Figure 10).

 

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