EDS Hardware

 

INCADryCool and INCAx-stream

 

Click on the links below for more information about INCA EDS hardware
INCAx-sight

INCADryCool

Guaranteed performance and productivity
Achieve the correct results at any count rate Why high count rates improve your productivity  Oxford Instruments detector development timeline

INCADryCool is a unique liquid nitrogen free EDS detector for SEM microanalysis with no compromise on analytical performance.

 

INCADryCool surpasses all existing solutions for liquid-nitrogen free X-ray detection offering both convenience and results you can rely on. INCADryCool is integrated seamlessly with the INCAEnergy EDS platform, the world's leading microanalysis system.

 

Together with the INCAx-stream pulse processor, INCADryCool offers the following key benefits for microanalysis on the SEM:

 

1. Convenience of liquid nitrogen-free operation

  • Designed for integration into environments where liquid nitrogen is unavailable and space is at a premium.

    • Footprint smaller than existing LN2 detectors.

    • Recommended for integration in semi-conductor FAB and other clean room environments.

  • Cooling provided by Patented Pulse Tube Cooler system

    • Requires only electrical supply

    • No external compressor, gas lines or valves

  • Cool on demand - detector cools down from room temperature to achieve the stability required for accurate analysis in less than 50 minutes.

  • Motorised slide for easy detector retraction.

2. No compromise on analytical performance

  • Si(Li) crystal X-ray detector performance, ideal for all microanalysis applications.

  • Sensor operating temperature regulated to a few tenths of a degree

    • Stable and optimum analysis including:

    • Reliable automatic element ID

    • Analysis of all X-ray lines including low energy lines (<1keV)

    • Accurate "out of the box" standardless analysis

  • Spectral performance equivalent to INCAx-sight EDS detectors

    • Performance guaranteed at all energies (including CKα and FKα) at 2,500 cps in line with ISO 15632:2002.  Find out more..

    • Peak position and resolution changes by less than 1eV between 1,000 and 10,000 cps.  Find out more..

3. Compatible with microanalysis at all microscope conditions

  • Innovative patented pulse tube design where only the sensor itself is cooled

    • Required cooling is significantly reduced because cooling is provided at the precise location it is needed.

  • Insignificant vibration even when working at very high (>50,000x) magnification.

4. Reliability of cooling technology developed for space applications.

  • Proven cooler lifetime

    • Designed to eliminate known failure modes of alternative cooling systems

    • 10 systems on lifetime tests (>240,000 hours) with no failures

    • High vacuum integrity of assembly means predicted lifetime is greater than for LN2 cooled detectors.

  • Designed for maximum uptime and preventative maintenance

    • Integrated data logger monitors all cooler parameters for on-site diagnostics service reporting.  This allows a support engineer to predict future maintenance requirements.

 

INCADryCool

Liquid nitrogen free  Si(Li) EDS detector based on patented PentaFET® technology and cooled with a pulse tube cooler,  guarantees output from the detector which is stable with count rate and provides convenient operation


INCAx-stream

Pulse processor designed specifically for INCAEnergy. Measures X-ray events accurately, whatever the count rate, with no change in resolution, and no change in energy calibration

INCADryCool

 

INCADryCool